Wavefront Aberration Measurement Deflectometry for Imaging Lens Tests

Lenses play an important role in imaging systems. Having effective way to test the aberrations of lenses is important. However, existing methods cannot satisfy requirements some conditions. To overcome these difficulties, wavefront aberration measurement deflectometry (WAMD) proposed this paper, which can reconstruct by measuring angular aberrations. The principle WAMD analyzed detail, and correctness feasibility method are verified both a simulation experiment. A telephoto lens single were tested experiment, RMS errors 166.8 nm (5.71%) 58.9 (4.74%), respectively, as compared with interferometer’s results. This widely applicable relatively reasonable accuracy. It has potential be applied manufacturing alignment process.